Scanning probe apparatus

ABSTRACT

A scanning probe apparatus for obtaining information of a sample, recording information in the sample, or processing the sample with relative movement between the sample and the apparatus, the apparatus is constituted by a probe; and a scanning stage including a drive element for moving a sample holding table for holding the sample and a movable portion movable in a direction in which an inertial force generated during movement of the sample holding table is cancelled. The scanning stage further includes a memory for storing characteristic information of the scanning stage and is detachably or replaceably mountable to a main assembly of the apparatus.

FIELD OF THE INVENTION AND RELATED ART

The present invention relates to a scanning probe apparatus ordinarilyutilizing a scanning probe microscope (SPM).

Particularly, the present invention relates to a scanning probeapparatus for obtaining information of a sample, recording informationin the sample, or processing the sample with relative movement between aprobe and the sample.

In recent years, a scanning tunneling microscope (STM) capable ofobserving a surface of an electroconductive substance with resolution ofnanometer or below has been developed. Further, an atomic forcemicroscope (AFM) or the like capable of observing a surface of aninsulating substance or the like with resolution similar to that of theSTM has also been developed.

As a further developed type thereof, a scanning near-field opticalmicroscope (SNOM) or the like for observing a surface state of a sampleby utilizing evanescent light leaking from a minute opening at a sharptip of a probe has been developed. In addition, a (scanning) magneticforce microscope (MFM), a scanning capacitance microscope (SCaM), ascanning thermal microscope (SThM), and the like have also beendeveloped.

As described above, microscopes capable of measuring various physicalamounts at the surfaces of the above described samples with highresolution by effecting scanning with respect to a probe or a samplehave been currently developed. These microscopes are inclusivelyreferred to as a scanning probe microscope (SPM).

In this SPM, in order to achieve high-accuracy control, suppression ofan occurrence of vibration caused by a scanning operation is required.

Japanese Laid-Open Patent Application (JP-A) No. 2002-082036 hasproposed a scanning mechanism for an SPM capable of suppressing anoccurrence of a vibration caused by a scanning operation to permithigh-accuracy position control at high speed.

More specifically, e.g., as shown in FIG. 5, a scanning mechanism 700includes bases 701 and 702 for drive elements (actuators), drive elementholding member 706 and 707 provided on the bases, a drive element 703held by these holding members and capable of expanding and contractingin Y direction, a drive element 704 fixed at one end of the driveelement 703 and capable of expanding and contracting in X direction, adrive element 705 fixed at one end of the drive element 704 and capableof expanding and contracting in Z direction, and a sample holding member708 provided on one end of the drive element 705. The drive element 705is connected to the drive element 704 in its center or the neighborhoodof the center. The drive element 704 is connected to the drive element703 in its center or the neighborhood of the center. The drive element703 is held by the holding members 706 and 707 in its center or theneighborhood of the center.

JP-A No. 2000-088983 has proposed an SPM which includes a small-size andlightweight drive stage causing less occurrence of vibration even whendriven at high speed and is capable of obtaining a clear image at highspeed.

More specifically, a drive stage is constituted by a supporting member,two or more movable portions supported by the supporting member, and oneor more drive element for driving the two or more movable portions. Thisdrive stage is constituted so that the movable portions are driven in adirection in which inertial forces generated in the movable portions aremutually cancelled during the drive of the drive elements.

More specifically, as shown in FIG. 6( a), the drive stage has such astructure that two cylindrical piezoelectric elements are concentricallydisposed. More specifically, inside a first cylindrical piezoelectricelement 800, a second cylindrical piezoelectric element 810 isconcentrically disposed. This state is shown in FIG. 6( a) as anexploded view. Around the first cylindrical piezoelectric element 800,divided four electrodes 801 to 804 are disposed, and at an upper portionof the first cylindrical piezoelectric element 800, a sample holdingtable 805 is connected. Further, around the second cylindricalpiezoelectric element 810, divided four electrodes 811 to 814 aredisposed, and at an upper portion of the second cylindricalpiezoelectric element 810, a weight 815 is connected. The first andsecond cylindrical piezoelectric elements 800 and 810 can be bent bycontrolling voltages applied to opposite two electrodes (801 and 803,802 and 804, 811 and 813, or 812 and 814) so that one of the twoelectrodes is expanded and the other electrode is contracted. Further,it is also possible to expand and contrast each of the cylindricalpiezoelectric elements in a long axis direction by applying the samevoltage to the divided four electrodes. In short, the bending and theexpansion and contraction of the cylindrical piezoelectric elements 800and 810 can be controlled by voltages.

As a result, it is possible to three-dimensionally drive the sampleholding table (movable table) 805 and the weight 815 disposed at theupper (top) portions of the cylindrical piezoelectric elements.

FIG. 6( b) is a wiring diagram for the drive stage in this embodiment.

By effecting wiring as shown in FIG. 6( b), the outer cylindricalpiezoelectric element 800 and the inner cylindrical piezoelectricelement 810 are always driven in mutually opposite directions. Abehavior of deformation of the cylindrical piezoelectric elements inshown in FIG. 6( c) as a schematic sectional view. In FIG. 6( c), thecylindrical piezoelectric element 800 is bent and expanded toward anupper left direction, and the cylindrical piezoelectric element 810 isbent and contracted toward a lower right direction. Gains(amplificationfactors) −Ax, −Ay, and −Az of amplifiers 820, 821 and 822 are set tocancel inertial forces with respect to the cylindrical piezoelectricelements 800 and 810 in X, Y and Z directions, respectively. Further,these gains may desirably be adjusted to optimum values when a weight ofan object to be placed on a moving table.

In this embodiment constituted as described above, the drive stage isalways driven so that inertial forces generated with respect to theouter first cylindrical piezoelectric element 800 and the inner secondcylindrical piezoelectric element 810 are cancelled. As a result, it ispossible to provide a stage causing less vibration even when the sampleholding table is driven at high speed.

Incidentally, in the SPM, a size of apparatus varies depending on a sizeof a sample to be observed and information to be observed. For example,in a case of small sample having a narrow field of view (scanningrange), a small drive stage is used. Further, in a case of a widescanning range, a large drive stage is used.

On the other hand, with respect to the probe, in the case of the AFM,the same probe can be used. For this reason, the scanning stage isremoved from a main assembly and another scanning stage is mounted tothe main assembly in some cases. In other words, only the scanning stagecan be replaced.

In this case, however, when a scanning stage including the abovedescribed movable portions (counterweight, balance weight) forcancelling inertial force is used, the following problem is caused tooccur.

When only the scanning stage is replaced while leaving the movableportions as they are, a balance relationship with the counterweightcannot be maintained, so that a desired cancellation of inertial forcecannot be effected in some cases. Particularly, in the case where anelectromechanical transducer such as a piezoelectric element is used asa drive element (actuator) for driving the scanning stage or thecounterweight, an operation performance of the drive element is changedwith time by the use of the drive element.

For this reason, when the SPM is continuously used by replacing only thescanning stage, such a phenomenon that deterioration of the driveelement for the counterweight occurs and on the other hand, the scanningstage is refreshed by replacement is caused to occur.

As a result, an amount of displacement with respect to an appliedvoltage is different between the drive element for the counterweight andthe drive element for the scanning stage, so that it is furtherdifficult to cancel the inertial force generated with respect to thescanning stage. Further, a characteristic, of the drive element for thescanning stage, such as an amount of displacement exhibits hysteresis inmany cases and varies for each of the drive elements.

In view of the above described circumstances, in order to drive thescanning stage so as to effect a desired cancellation of inertial force,an operator is required to make correction every replacement of thescanning stage. As a result, the scanning probe apparatus requiresexpense in time and effect such that the operator makes correction sothat the inertial force generated with respect to the scanning stage isproperly cancelled every time the scanning stage is replaced.

SUMMARY OF THE INVENTION

A principal object of the present invention is to provide a scanningprobe apparatus capable of properly cancelling inertial force generatedwith respect to a scanning stage and a drive stage without requiringexpense in time and effort such that an operator makes correction everytime the scanning stage or the drive stage is replaced.

According to an aspect of the present invention, there is provided ascanning probe apparatus for obtaining information of a sample,recording information in the sample, or processing the sample withrelative movement between the sample and the apparatus, the apparatuscomprising:

a probe; and

a scanning stage comprising a drive element for moving a sample holdingtable for holding the sample and a movable portion movable in adirection in which an inertial force generated during movement of thesample holding table is cancelled,

wherein the scanning stage further comprises a memory for storingcharacteristic information of the scanning stage and is detachably orreplaceably mountable to a main assembly of the apparatus.

In a preferred embodiment, the scanning stage is constituted so that thesample holding table, the drive element, and the movable portion aredetachably or replaceably mountable integrally to the main assembly ofthe apparatus. Further, the apparatus may further preferably comprisecommunication means, on its main assembly side, for receiving theinformation stored in the memory in a noncontact manner, and whereindrive of the scanning stage is controlled on the basis of theinformation received by the communication means. Each of the driveelement and the movable portion may preferably comprise anelectromechanical transducer. The electromechanical transducer maypreferably comprise a first cylindrical piezoelectric elementconstituting the drive element and a second cylindrical piezoelectricelement which constitutes the movable portion and is disposed inside thefirst cylindrical piezoelectric element.

According to another aspect of the present invention, there is provideda scanning probe apparatus for obtaining information of a sample,recording information in the sample, or processing the sample withrelative movement between the sample and the apparatus, the apparatuscomprising:

a probe drive stage comprising a drive element for moving a probeholding table and a movable portion movable in a direction in which aninertial force generated during movement of the probe holding table iscancelled; and

a scanning stage for holding a sample,

wherein the probe drive stage further comprises a memory for storingcharacteristic information of the probe drive stage and is detachably orreplaceably mountable to a main assembly of the apparatus.

In a preferred embodiment, the probe drive stage is constituted so thatthe probe holding table, the drive element, and the movable portion aredetachably or replaceably mountable integrally to the main assembly ofthe apparatus. Further, the apparatus may further preferably comprisecommunication means, on its main assembly side, for receiving theinformation stored in the memory in a noncontact manner, and whereindrive of the scanning stage is controlled on the basis of theinformation received by the communication means. Each of the driveelement and the movable portion comprises an electromechanicaltransducer. The electromechanical transducer comprises a firstcylindrical piezoelectric element constituting the drive element and asecond cylindrical piezoelectric element which constitutes the movableportion and is disposed inside the first cylindrical piezoelectricelement.

In a preferred embodiment, any one of the above described scanning probeapparatuses may preferably include a probe drive stage for driving aprobe and a scanning stage for holding a sample, wherein the probe drivestage is any one of the above described probe drive stage and thescanning stage is any one of the above described scanning stages.

According to a further aspect of the present invention, there isprovided a stage for a scanning probe apparatus for obtaininginformation of a sample, recording information in the sample, orprocessing the sample with relative movement between the sample and theapparatus, the stage comprising:

a drive element for moving a probe or a sample holding table for holdingthe sample and a movable portion movable in a direction in which aninertial force generated during movement of the probe or the sampleholding table is cancelled,

wherein the stage further comprises a memory for storing characteristicinformation of the stage and is detachably or replaceably mountable to amain assembly of the apparatus.

According to the present invention, it is possible to provide a scanningprobe apparatus capable of properly cancelling inertial force generatedwith respect to a scanning stage and a drive stage while alleviatingexpense in time and effort such that an operator makes correction everytime the scanning stage or the drive stage is replaced.

These and other objects, features and advantages of the presentinvention will become more apparent upon a consideration of thefollowing description of the preferred embodiments of the presentinvention taken in conjunction with the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic sectional view showing a scanning stagereplaceable with respect to a main assembly of a scanning probeapparatus in Embodiment 1 of the present invention.

FIG. 2 is a schematic view for illustrating a constitution of thescanning stage used in the scanning probe apparatus in Embodiment 1 ofthe present invention.

FIG. 3 is a schematic wiring diagram of the scanning stage used in thescanning probe apparatus in Embodiment 1 of the present invention.

FIG. 4 is a schematic view for illustrating an embodiment of aconstitution of a scanning probe apparatus including a probe drive stageand a sample stage both of which are provided with a memory inEmbodiment 2 of the present invention.

FIG. 5 is a schematic view for illustrating a scanning mechanism for aconventional scanning probe microscope (SPM) described in JP-A No.2002-082036.

FIGS. 6( a), 6(b) and 6(c) are schematic views for illustrating a drivestage of a conventional SPM described in JP-A No. 2000-088983.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

According to a constitution of the present invention, it is possible toperform calibration of a scanning stage automatically on the basis ofcharacteristic information and usage history information withoutcausing, e.g., the above described problem of a conventional case whereonly a scanning piezoelectric element is replaced. As a result, evenwhen a scanning probe apparatus is repetitively used, it is possible toalways cancel the inertial force effectively to suppress vibration.Particularly, as described below, the scanning probe apparatus accordingto the present invention effectively meets demands for scanning in Zdirection in which movement is effected at a highest frequency amongthose for movements in X, Y and Z directions.

A scanning probe microscope (SPM) is capable of effecting rasterscanning of a probe and a sample relative to each other in XY directionsto obtain surface information in a desired sample region through theprobe, thus displaying the surface information on a TV monitor in amapping mode. Further, the SNOM or the like is capable of effecting fineprocessing by the action of light emitted from a tip of the probe onto amember to be processed or capable of effecting information recordingwith light. Further, it is also possible to effect fine processing orinformation recording by forming projections and recesses at a samplesurface.

In such an SPM, a scanning mechanism for effecting motion in Z directionby performing feedback control so that an interaction between the sampleand probe is constant also in Z direction during XY scanning. The motionin Z direction is, different from regular movement in XY directions, anirregular motion since it reflects a sample shape or sample state of thesample. The Z direction scanning is a motion at a highest frequencyamong the scannings in XYZ directions. More specifically, the SPM has ascanning frequency of from about 0.05 Hz to about 200 Hz in X direction.A Y direction scanning frequency is about 1/(number of Y directionscanning lines). The number of Y direction scanning lines is 10-1000lines. Further, a Z direction scanning frequency is from about (Xdirection scanning frequency)×(number of pixels per one scanning line inX direction) to about 100×(X direction scanning frequency)×(number ofpixels per one scanning line in X direction).

For example, when an image of 100 pixels in X direction and 100 pixelsin Y direction is acquired in 1 sec. The X direction scanning frequencyis 100 Hz, the Y direction scanning frequency is 1 Hz, and the Zdirection scanning frequency is 10 kHz or more. Incidentally, the Zdirection scanning frequency in this embodiment is a currently mosthighest-level scanning frequency. The X direction scanning frequency isordinarily about several Hz. In order to realize the above describedhigher-level frequencies as in this embodiment, a scanning mechanismtherefor is required to be not only stable against external vibrationbut also suppressed in vibration generated by the scanning mechanismitself during an inner scanning operation.

The present invention is capable of effectively meeting such arequirement.

Hereinbelow, embodiments of the present invention will be described.

Embodiment 1

In Embodiment 1, the present invention is applied so as to constitute areplaceable scanning stage used in a scanning probe apparatus.

FIG. 1 is a schematic sectional view of a scanning stage which isreplaceable with respect to a main assembly of a scanning probeapparatus in this embodiment. FIG. 2 is a schematic view forillustrating the constitution of the scanning stage used in the scanningprobe apparatus illustrating the constitution of the scanning stage usedin the scanning probe apparatus in this embodiment.

Referring to FIGS. 1 and 2, the scanning probe apparatus includes arecess 1 provided to a main assembly of the scanning probe apparatus; abottom supporting table 2; an electric connector 3 provided to thebottom supporting table; an electric connector 4, to be connected to theelectric connector 3, provided at the recess of the main assembly of thescanning probe apparatus; a memory 5, provided at an outer portion ofthe bottom supporting table, for storing various characteristicinformation of the scanning stage; and a communication circuit module 6provided on the main assembly side of the scanning probe apparatus.Further, the scanning probe apparatus includes a first cylindricalpiezoelectric element 500, a movement table 505, a second cylindricalpiezoelectric element 510, and a weight 515. The first cylindricalpiezoelectric element 500 and the second cylindrical piezoelectricelement 510 are disposed concentrically in a cross section in ahorizontal direction. In other words, these cylindrical piezoelectricelements 500 and 510 are disposed so that their center axes are alignedwith each other.

In this embodiment, the scanning stage is constituted by the bottomsupporting table 2, the first cylindrical piezoelectric element 500which is fixed on the bottom supporting table 2 and provided with themovement table 505, and the second cylindrical piezoelectric element 510which is fixed on the bottom supporting table 2 and provided with theweight 515. The scanning stage is detachably or replaceably mountable tothe main assembly of the scanning probe apparatus so as to be engaged inthe recess 1 provided to the main assembly of the scanning probeapparatus.

At a bottom surface of the recess 1, the electric connector 4 isprovided and connected to the electric connector 3 provided to thebottom supporting table 2 when the scanning stage is engaged into therecess 1. As a result, a signal for driving the first cylindricalpiezoelectric element 500 constituting the scanning piezoelectricelement as a drive element for a sample table and the second cylindricalpiezoelectric element 510 as a counter piezoelectric element isexternally sent.

At an outer portion of the bottom supporting table 2 constituting thescanning stage described above, the memory 5 in which variouscharacteristic information is stored is provided and integrallyreplaceable, with the scanning stage, from the recess 1 of the mainassembly of the scanning probe apparatus.

In this embodiment, the memory 5 is mounted to an IC chip capable ofeffecting wireless information communication and stores thereincharacteristic information with respect to the scanning stage. Thecharacteristic information includes calibration or correctioninformation of the scanning piezoelectric element, operation informationof the counter piezoelectric element, etc. Examples of the calibrationinformation may include characteristic information such that a distance(nm) of movement of the scanning piezoelectric element in a direction(X, Y or Z direction) when a voltage of 3 volts is applied to thescanning piezoelectric element.

Further, the operation information is information, such as an amount ofmovement of a counterweight relative to that of the scanningpiezoelectric element, for establishing association between bothcharacteristics of the scanning piezoelectric element and the counterpiezoelectric element.

On the other hand, the communication circuit module 6 for effectingwireless communication with the IC chip in a noncontact manner isprovided on the scanning probe apparatus main assembly side. When thescanning stage is engaged into the recess 1 of the scanning probeapparatus main assembly to turn power of the apparatus main assembly on,the module 6 effect mutual communication with the IC chip to read thecharacteristic information of the scanning stage.

On the basis of the read characteristic information, the main assemblyperforms the calibration of the scanning stage, thus permitting accuratescanning. Further, every use of the scanning probe apparatus, usagehistory information is written in the memory of the IC chip. Thus, onthe basis of the characteristic information and the usage historyinformation, the main assembly effects operation control of the scanningstage.

As described above, the scanning piezoelectric element is constituted bythe first cylindrical piezoelectric element 500 and an upper (top)portion thereof, a circular plate-like movement table 505 as a sampletable is provided.

On the other hand, the counter piezoelectric element is constituted bythe second cylindrical piezoelectric element 510 having a smallerdiameter than the scanner drive element 500 and the weight 515 as acounterweight is provided at an upper portion of the second cylindricalpiezoelectric element 510.

The respective piezoelectric elements are driven in a manner asdescribed in JP-A No. 2000-088983.

Next, a specific constitution of the scanning stage will be described indetail with reference to FIG. 2.

As shown in FIG. 2, the scanning stage in this embodiment includes adrive stage having such a structure that the cylindrical piezoelectricelements are concentrically disposed. More specifically, inside thefirst cylindrical piezoelectric element 500, the second cylindricalpiezoelectric element 510 is concentrically disposed. This state isshown in FIG. 2 as an exploded view. Around the first cylindricalpiezoelectric element 500, divided four electrodes 501 to 504 aredisposed (in FIG. 2, the electrode 504 is not shown since it is locatedon a backside), and at an upper portion of the first cylindricalpiezoelectric element 500, the movement table 505 is connected. Further,around the second cylindrical piezoelectric element 510, divided fourelectrodes 511 to 514 are disposed (in FIG. 2, the electrode 514 is notshown), and at an upper portion of the second cylindrical piezoelectricelement 510, the weight 515 is connected. The first and secondcylindrical piezoelectric elements 500 and 510 can be bent bycontrolling voltages applied to opposite two electrodes (501 and 503,502 and 504, 511 and 513, or 512 and 514) so that one of the twoelectrodes is expanded and the other electrode is contracted. Further,it is also possible to expand and contrast each of the cylindricalpiezoelectric elements in a long axis direction by applying the samevoltage to the divided four electrodes. In short, the bending and theexpansion and contraction of the cylindrical piezoelectric elements 500and 510 can be controlled by voltages.

Therefore, it is possible to three-dimensionally drive the movementtable 505 and the weight 515 disposed at the upper (top) portions of thecylindrical piezoelectric elements.

In the present invention, it is also possible to employ such aconstitution that the electrodes 501-504 are used for scannings in X andY directions and another piezoelectric element is provided for Z axisdriving. In this case, the piezoelectric element for Z axis driving isdisposed above the electrodes 501-504.

FIG. 3 is a wiring diagram for the scanning stage in this embodiment.

By effecting wiring as shown in FIG. 3, the outer cylindricalpiezoelectric element 500 and the inner cylindrical piezoelectricelement 510 are always driven in mutually opposite directions. Abehavior of deformation of the cylindrical piezoelectric elements in thesame as in JP-A No. 2000-088983. Similarly, as in the case of FIG. 6(c), the cylindrical piezoelectric element 500 is bent and expandedtoward an upper left direction, the cylindrical piezoelectric element510 is bent and contracted toward a lower right direction.Gains(amplification factors)−Ax, −Ay, and −Az of amplifiers 520, 521 and522 are set to cancel inertial forces with respect to the cylindricalpiezoelectric elements 500 and 510 in X, Y and Z directions,respectively. Further, these gains may desirably be adjusted to optimumvalues when a weight of an object to be placed on the movement table ischanged.

According to the above described constitution of this embodiment, theouter first cylindrical piezoelectric element 500 and the inner secondcylindrical piezoelectric element 510 are always driven so that theirinertial forces are cancelled each other. Thus, it is possible toprovide a stage with less vibration even when the stage is driven athigh speed. In this embodiment, not only the first cylindricalpiezoelectric element 500 as the scanning piezoelectric element but alsothe bottom supporting table 2 on which the scanning piezoelectricelement and the counter piezoelectric element for cancelling theinertial forces are fixed are constituted so as to be replaceable fromor detachably mountable to the apparatus main assembly. As a result,both of the piezoelectric elements are integrally replaceable.

Accordingly, in the present invention, the above described problem as inthe case where only the scanning piezoelectric element is replaced whileusing the counter piezoelectric element for inertial force cancellationas it is in the conventional scanning probe apparatus is not caused tooccur. Further, it is possible to automatically effect the calibrationof the scanning stage on the basis of the characteristic information andthe usage history information. Thus, even when the scanning probeapparatus is repetitively used while replacing the scanning stage, theinertial forces are always well cancelled, so that it is possible tosuppress the vibration.

Incidentally, in this embodiment, the cylindrical piezoelectric elementsare used but the present invention is not limited thereto. For example,it is also possible to achieve a similar effect in a case of usingthree-axis orthogonal piezoelectric elements.

Embodiment 2

In Embodiment 2, a constitution of a scanning probe apparatus includinga probe drive stage and a sample stage both of which are provided with amemory will be described. In this embodiment, as the sample stage, asample stage having the same constitution as that in Embodiment 1 isused.

Further, to the probe drive stage, a basic constitution of the samplestage in Embodiment 1 is also applied so as to constitute such a probedrive stage that it is provided with a drive element for moving a probeholding table and a movable portion for cancelling inertial forcegenerated during movement of the probe holding table. Further, the probedrive stage is constituted so that the movable portion and the driveelement including the probe holding stage are integrally replaceablefrom the main assembly of the scanning probe apparatus.

FIG. 4 is a schematic view for illustrating a constitution of thescanning probe apparatus in this embodiment.

Referring to FIG. 4, the scanning probe apparatus includes a scanningprobe apparatus main assembly 610; a sample stage supporting portion 611having an engaging recess in the scanning probe apparatus main assembly;a bottom base table 612 of sample stage; a sample 613 mounted on thesample stage; a probe drive stage supporting portion 614 having anengaging recess in the scanning probe apparatus main assembly; a bottombase table 615 of probe drive stage; a scanning probe 616; a probe 617;a control computer 618 for controlling the entire scanning probeapparatus; a memory 619, provided at an outer portion of the samplestage bottom base table 612, for storing various characteristicinformation of the scanning stage; a communication circuit module 620provided on the apparatus main assembly side; a memory 621, provided atan outer portion of the drive stage bottom base table 615, for storingvarious characteristic information of the probe drive stage; and acommunication circuit module 622 provided on the apparatus main assemblyside. Each of these memories 619 and 621 is mounted to an IC chipcapable of effecting wireless communication similarly as inEmbodiment 1. In the memory 619, the characteristic information of thescanning stage is stored. In the memory 621, the characteristicinformation of the probe drive stage is stored.

In the above described constitution of this embodiment, both of thestages each including the inertial force cancelling piezoelectricelement are constituted so as to be integrally replaceable together withthe inertial force cancelling piezoelectric elements. Such a replaceableconstitution is basically similar to that in Embodiment 1. In this case,through electric connectors (not shown) provided to the respectivemembers, these members are constituted so as to be electricallyconnected to each other. In this regard, a constitution similar to thatin Embodiment 1 is also basically employed in this embodiment.

When power of the apparatus main assembly is turned on, thecommunication circuit modules 619 and 621 provided on the apparatus mainassembly side and the IC chips including the memories 620 and 620communicate with each other, so that each of calibrations is performedon the basis of associated characteristic information. Further, usagehistory information is updated every use of the scanning probeapparatus.

Operation control on the basis of the characteristic information andusage history information is effected in a basically similar manner asin Embodiment 1.

According to the constitution of this embodiment, during replacement ofthe probe drive stage or the scanning stage, it is possible toautomatically effect calibration of an associate stage on the basis ofthe characteristic information and the usage history information.

Thus, even when the scanning probe apparatus is repetitively used theinertial forces are always well cancelled, so that it is possible tosuppress the vibration.

The scanning prove apparatus according to the present invention issuitably used as not only the above described microscope for obtaininginformation of a sample but also an information recording apparatus forrecording information in a recording material as a sample by bringingthe probe close to the recording material and passing current betweenthe recording material and the probe to change a state of the recordingmaterial in a minute area and a processing apparatus for processing asample by bringing the probe close to the sample and passing currentbetween the sample and the probe.

While the invention has been described with reference to the structuresdisclosed herein, it is not confined to the details set forth and thisapplication is intended to cover such modifications or changes as maycome within the purpose of the improvements or the scope of thefollowing claims.

This application claims priority from Japanese Patent Application No.024712/2006 filed Feb. 1, 2006, which is hereby incorporated byreference.

1. A scanning probe apparatus for obtaining information of a sample,recording information in the sample, or processing the sample, theapparatus comprising: a probe; and a scanning stage for moving thesample relative to the probe, wherein the scanning stage comprises: asample holding table for holding the sample; a scanning piezoelectricelement for moving the sample holding table; a movable portion,comprising a counterweight and a counter piezoelectric element, movablein a direction in which an inertial force generated during movement ofthe sample holding table is canceled; and a memory, storing calibrationinformation of the scanning piezoelectric element and operationinformation for establishing association between characteristics of thescanning piezoelectric element and the counter piezoelectric element,for writing therein usage history information of the scanning probeapparatus, and wherein the sample holding table, the scanningpiezoelectric element, the movable portion, and the memory aredetachably or replaceably mountable to a main assembly of the scanningprobe apparatus.
 2. An apparatus according to claim 1, wherein theapparatus further comprises communication means, on its main assemblyside, for receiving the calibration information of the scanningpiezoelectric element and operation information of the scanning stagestored in the memory in a noncontact manner, and wherein drive of thescanning stage is controlled on a basis of the calibration informationof the scanning piezoelectric element and operation information receivedby the communication means.
 3. An apparatus according to claim 1,wherein a first cylindrical piezoelectric element constitutes thescanning piezoelectric element, and a second cylindrical piezoelectricelement constitutes the counter piezoelectric element and is disposedinside the first cylindrical piezoelectric element.
 4. A scanning probeapparatus for obtaining information of a sample, recording informationin the sample, or processing the sample, the apparatus comprising: asample stage for holding the sample; and a probe driving stage formoving the probe relative to the sample, wherein the probe driving stagecomprises: a probe holding table for holding the probe; a scanningpiezoelectric element for moving the probe holding table; a movableportion, comprising a counterweight and a counter piezoelectric element,movable in a direction in which an inertial force generated duringmovement of the probe holding table is canceled; and a memory, storingcalibration information of the scanning piezoelectric element andoperation information for establishing association betweencharacteristics of the scanning piezoelectric element and the counterpiezoelectric element, for writing therein usage history information ofthe scanning probe apparatus, and wherein the probe holding table, thescanning piezoelectric element, the movable portion, and the memory aredetachably or replaceably mountable to a main assembly of the scanningprobe apparatus.
 5. An apparatus according to claim 4, wherein theapparatus further comprises communication means, on its main assemblyside, for receiving the calibration information of the scanningpiezoelectric element and operation information of the probe drive stagestored in the memory in a noncontact manner, and wherein drive of thescanning stage is controlled on a basis of the calibration informationof the scanning piezoelectric element and operation information receivedby the communication means.
 6. An apparatus according to claim 4,wherein a first cylindrical piezoelectric element constitutes thescanning piezoelectric element, and a second cylindrical piezoelectricelement constitutes the counter piezoelectric element and is disposedinside the first cylindrical piezoelectric element.
 7. A stage, for ascanning probe apparatus for obtaining information of a sample,recording information in the sample, or processing the sample, forperforming relative movement between the sample and a probe, the stagecomprising: a holding table for holding the sample or the probe; ascanning piezoelectric element for moving the holding table; a movableportion, comprising a counterweight and a counter piezoelectric element,movable in a direction in which an inertial force generated duringmovement of the holding table is canceled; and a memory, storingcalibration information of the scanning piezoelectric element andoperation information for establishing association betweencharacteristics of the scanning piezoelectric element and the counterpiezoelectric element, for writing therein usage history information ofthe scanning probe apparatus, and wherein the holding table, thescanning piezoelectric element, the movable portion, and the memory aredetachably or replaceably mountable to a main assembly of the scanningprobe apparatus.